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Precision Microchannel Heat Sink for Semiconductor Wafers

Wafer heat sinks are used for high-precision temperature control of wafers in semiconductor equipment, imposing stringent requirements on temperature uniformity, cleanliness, and sealing performance. Chuangkuo wafer heat sinks adopt high-thermal-conductivity base materials with built-in precision flow channels, featuring low flow resistance and uniform heat exchange. The stable welding process meets the clean-use conditions of the semiconductor industry.

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Product Description
01
Core Advantages

❶High temperature uniformity, ensuring consistent wafer temperature.

❷Precision flow channels with controllable pressure drop. 

❸Strict helium leak testing, no leakage risk.

❹Supporting non-standard sizes and custom interfaces.

02
Application Areas

Semiconductor Wafer Process Equipment.